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Simulation and Fabrication of Gradient Films via Shadow-Mask-Assisted Magnetron Sputtering for Uniform Heating in Nonrectangular Areas.

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Bibliographic Details
Title:	Simulation and Fabrication of Gradient Films via Shadow-Mask-Assisted Magnetron Sputtering for Uniform Heating in Nonrectangular Areas.
Authors:	Shi, Runqi¹, Gao, Runzhe², Ou, Yingchun¹, ouyingchun@cbma.com.cn, Tian, Haodong^1,2, Xu, Shuang¹, Jia, Jinsheng¹, Han, Bin¹
Source:	Applied Sciences (2076-3417); Feb2026, Vol. 16 Issue 3, p1556, 19p
Database:	Applied Science & Technology Source
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ISSN:	20763417
DOI:	10.3390/app16031556