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Process Control by Optical Emission Spectroscopy During Reactive Magnetron Sputtering of NiV x O y Electrochromic Coatings.

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Bibliographic Details
Title: Process Control by Optical Emission Spectroscopy During Reactive Magnetron Sputtering of NiV x O y Electrochromic Coatings.
Authors: Hernandez-Rodriguez, Oihane1, oihane.hernandez@tekniker.es, Guzman, Gregorio2,3, Ortiz, Rocio1,3, Zuza, Ester4, Bellido-Gonzalez, Victor5, Quintana, Iban1, Gutierrez-Berasategui, Eva1,2
Source: Coatings (2079-6412); Feb2026, Vol. 16 Issue 2, p206, 21p
Database: Applied Science & Technology Source
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ISSN:20796412
DOI:10.3390/coatings16020206