View in EDS HTML Full Text PDF Full Text

Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.

Saved in:

Bibliographic Details
Title:	Effect of Grain-Size Control on Mechanical and Optical Properties of ZrSi 2 Membranes for Extreme Ultraviolet Pellicles.
Authors:	Kim, Won Jin^1,2, Wi, Seong Ju^1,2, Moon, Seungchan^2,3, Hong, Junho^1,2, Lee, Taeho², Park, Young Wook^2,3, Ahn, Jinho^1,2,3, jhahn@hanyang.ac.kr
Source:	Crystals (2073-4352); Feb2026, Vol. 16 Issue 2, p150, 10p
Database:	Applied Science & Technology Source
Full text is not displayed to guests. Login for full access.

Description
ISSN:	20734352
DOI:	10.3390/cryst16020150