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Simplified aluminum nitride processing for low-loss integrated photonics and nonlinear optics.

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Bibliographic Details
Title: Simplified aluminum nitride processing for low-loss integrated photonics and nonlinear optics.
Authors: Yan, Haochen1,2, Zhang, Shuangyou1,3, shzhan@dtu.dk, Pal, Arghadeep1,2, Ghosh, Alekhya1,2, Alabbadi, Abdullah1,2, Kheyri, Masoud1,2, Bi, Toby1,2, Zhang, Yaojing1,4, Harder, Irina1, Ohletz, Olga1, Gannott, Florentina1, Gumann, Alexander1, Butzen, Eduard1, Ludwig, Katrin1, Del'Haye, Pascal1,2, pascal.delhaye@mpl.mpg.de
Source: npj Nanophotonics; 3/4/2026, Vol. 3 Issue 1, p1-8, 8p
Database: Applied Science & Technology Source
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