Sputter deposition of epitaxial manganese boride Mn2B(100) films.
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| Title: | Sputter deposition of epitaxial manganese boride Mn2B(100) films. |
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| Authors: | Rahman, Sanzida1, Shu, Rui1, shur@rpi.edu, Gall, Daniel1, shur@rpi.edu |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; Mar2026, Vol. 44 Issue 2, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/6.0005221 |