Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance.
Saved in:
| Title: | Optimization of Bubble Tube Design for Enhanced Wafer Cleaning Tank Performance. |
|---|---|
| Authors: | Yin, H. N.1, yhn23@stu.just.edu.cn, Cai, L. H.1,2, Yao, J.3, Fang, H. F.1,2 |
| Source: | Journal of Applied Fluid Mechanics; May2026, Vol. 19 Issue 5, p1188-1204, 17p |
| Database: | Applied Science & Technology Source |
Be the first to leave a comment!
