Positive‐Tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet‐Etching.

Saved in:
Bibliographic Details
Title: Positive‐Tone Nanolithography of Antimony Trisulfide with Femtosecond Laser Wet‐Etching.
Authors: Dey, Abhrodeep1,2, Hübner, Uwe2, Benardais, Albane3, Wu, Xiaofei2, Dellith, Andrea2, Dellith, Jan2, Wieduwilt, Torsten2, Schneidewind, Henrik2, Schmidt, Markus A2,4,5, Nazabal, Virginie3, Deckert, Volker1,2,4,6, volker.deckert@uni-jena.de, Huang, Jer‐Shing1,2,4,7,8, Wang, Wei1,2, w.wang@uni-jena.de
Source: Advanced Functional Materials; 4/16/2026, Vol. 36 Issue 31, p1-11, 11p
Database: Applied Science & Technology Source
Description
ISSN:1616301X
DOI:10.1002/adfm.202511043