Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings.
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| Title: | Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings. |
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| Authors: | Chang, Chi-Lung1,2, Shen, Guan-Lun1, Yang, Fu-Sen3, Tang, Jian-Fu1,4, jftang@nkust.edu.tw |
| Source: | Vacuum; Aug2026, Vol. 251, pN.PAG-N.PAG, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/j.vacuum.2026.115358 |
