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Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings.

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Bibliographic Details
Title: Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings.
Authors: Chang, Chi-Lung1,2, Shen, Guan-Lun1, Yang, Fu-Sen3, Tang, Jian-Fu1,4, jftang@nkust.edu.tw
Source: Vacuum; Aug2026, Vol. 251, pN.PAG-N.PAG, 1p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193618065
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Label: Title
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  Data: Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings.
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  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Chang%2C+Chi-Lung%22">Chang, Chi-Lung</searchLink><relatesTo>1,2</relatesTo><br /><searchLink fieldCode="AU" term="%22Shen%2C+Guan-Lun%22">Shen, Guan-Lun</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Yang%2C+Fu-Sen%22">Yang, Fu-Sen</searchLink><relatesTo>3</relatesTo><br /><searchLink fieldCode="AU" term="%22Tang%2C+Jian-Fu%22">Tang, Jian-Fu</searchLink><relatesTo>1,4</relatesTo>, <i>jftang@nkust.edu.tw</i>
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  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; Aug2026, Vol. 251, pN.PAG-N.PAG, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=193618065
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/j.vacuum.2026.115358
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: N.PAG
    Titles:
      – TitleFull: Peak power density and bias-driven texture stabilization with a deposition rate anomaly in HiPIMS co-sputtered AlCrTiN coatings.
        Type: main
  BibRelationships:
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      – PersonEntity:
          Name:
            NameFull: Chang, Chi-Lung
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            NameFull: Shen, Guan-Lun
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            NameFull: Yang, Fu-Sen
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            NameFull: Tang, Jian-Fu
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          Dates:
            – D: 01
              M: 08
              Text: Aug2026
              Type: published
              Y: 2026
          Identifiers:
            – Type: issn-print
              Value: 0042207X
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            – Type: volume
              Value: 251
          Titles:
            – TitleFull: Vacuum
              Type: main
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