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基于 MEMS 探卡的 WLP 晶圆芯片测试研究....
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基于 MEMS 探卡的 WLP 晶圆芯片测试研究.
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Bibliographic Details
Title:
基于 MEMS 探卡的 WLP 晶圆芯片测试研究. (Chinese)
Authors:
伍 平
1
,
李桦林
1
,
唐小龙
1
,
高钰奇
1
,
王 鹏
1
,
毛 琨
1
,
付红霞
1
Source:
Piezoelectrics & Acoustooptics
; Apr2026, Vol. 48 Issue 2, p350-354, 5p
Database:
Applied Science & Technology Source
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ISSN:
10042474
DOI:
10.11977/j.issn.1004-2474.2026.02.021