Fabrication optimization of suspended stencil mask lithography for multi-terminal Josephson junctions.
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| Title: | Fabrication optimization of suspended stencil mask lithography for multi-terminal Josephson junctions. |
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| Authors: | Teller, Justus1,2, j.teller@fz-juelich.de, Jalil, Abdur Rehman3, Lentz, Florian4, Grützmacher, Detlev1,2, Schäpers, Thomas1,2, th.schaepers@fz-juelich.de |
| Source: | Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 21662746 |
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| DOI: | 10.1116/6.0005295 |
