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Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry.

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Bibliographic Details
Title: Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry.
Authors: Gamachchi, Dilan M.1, Ziemke, Carson D.1, Miller, Jackson M.1, Davison, Harrison C.1, Vandendaele, Wyatt B.1, Denn, Patricia A.1, Stoddard, Bryce D.1, Davidson, Carter T.1, Aurora, Vishvi N.1, Stalla, David2, Niavol, Somayeh Saadat1, Meng, Andrew C.1, acmeng@missouri.edu
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-9, 9p
Database: Applied Science & Technology Source
Description
ISSN:21662746
DOI:10.1116/6.0005267