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Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry.

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Title: Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry.
Authors: Gamachchi, Dilan M.1, Ziemke, Carson D.1, Miller, Jackson M.1, Davison, Harrison C.1, Vandendaele, Wyatt B.1, Denn, Patricia A.1, Stoddard, Bryce D.1, Davidson, Carter T.1, Aurora, Vishvi N.1, Stalla, David2, Niavol, Somayeh Saadat1, Meng, Andrew C.1, acmeng@missouri.edu
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; May2026, Vol. 44 Issue 3, p1-9, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193810245
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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        Value: 10.1116/6.0005267
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        Text: English
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      – TitleFull: Ion beam mixing effects in focused ion beam time-of-flight secondary ion mass spectrometry.
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              Text: May2026
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              Y: 2026
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