Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening.
Saved in:
| Title: | Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening. |
|---|---|
| Authors: | Wen, Chi-Jen1, Lin, Tee1, Ali Zargar, Omid2, omid@ncut.edu.tw, Hsieh, Chi-Huan1, Hu, Shih-Cheng3, Shih, Yang-Cheng1, Leggett, Graham4 |
| Source: | IEEE Transactions on Semiconductor Manufacturing; May2026, Vol. 39 Issue 2, p310-319, 10p |
| Database: | Applied Science & Technology Source |
| ISSN: | 08946507 |
|---|---|
| DOI: | 10.1109/TSM.2026.3665224 |
