APA (7th ed.) Citation

Wen, C., Lin, T., Ali Zargar, O., Hsieh, C., Hu, S., Shih, Y., & Leggett, G. (2026). Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening. IEEE Transactions on Semiconductor Manufacturing, 39(2), 310. https://doi.org/10.1109/TSM.2026.3665224

Chicago Style (17th ed.) Citation

Wen, Chi-Jen, Tee Lin, Omid Ali Zargar, Chi-Huan Hsieh, Shih-Cheng Hu, Yang-Cheng Shih, and Graham Leggett. "Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening." IEEE Transactions on Semiconductor Manufacturing 39, no. 2 (2026): 310. https://doi.org/10.1109/TSM.2026.3665224.

MLA (9th ed.) Citation

Wen, Chi-Jen, et al. "Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening." IEEE Transactions on Semiconductor Manufacturing, vol. 39, no. 2, 2026, p. 310, https://doi.org/10.1109/TSM.2026.3665224.