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Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening.

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Title: Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening.
Authors: Wen, Chi-Jen1, Lin, Tee1, Ali Zargar, Omid2, omid@ncut.edu.tw, Hsieh, Chi-Huan1, Hu, Shih-Cheng3, Shih, Yang-Cheng1, Leggett, Graham4
Source: IEEE Transactions on Semiconductor Manufacturing; May2026, Vol. 39 Issue 2, p310-319, 10p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 193839473
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening.
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  Data: <searchLink fieldCode="JN" term="%22IEEE+Transactions+on+Semiconductor+Manufacturing%22">IEEE Transactions on Semiconductor Manufacturing</searchLink>; May2026, Vol. 39 Issue 2, p310-319, 10p
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      – Type: doi
        Value: 10.1109/TSM.2026.3665224
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      – Code: eng
        Text: English
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        PageCount: 10
        StartPage: 310
    Titles:
      – TitleFull: Effectiveness of a High-Velocity-Type Laminar Air Curtain Device for Moisture Isolation Under EFEM Airflow Deflection During FOUP Door Opening.
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            NameFull: Wen, Chi-Jen
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            NameFull: Lin, Tee
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            NameFull: Ali Zargar, Omid
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            NameFull: Hsieh, Chi-Huan
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            NameFull: Hu, Shih-Cheng
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            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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            – TitleFull: IEEE Transactions on Semiconductor Manufacturing
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