A digital twin-driven approach for process parameters selection in planarization technology.

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Bibliographic Details
Title:	A digital twin-driven approach for process parameters selection in planarization technology.
Authors:	Piotrowski, Norbert¹, norbert.piotrowski@pg.edu.pl
Source:	Advances in Science & Technology Research Journal; 2026, Vol. 20 Issue 5, p213-222, 10p
Database:	Applied Science & Technology Source

Description
ISSN:	20804075
DOI:	10.12913/22998624/216083