Electrode compensation strategy for etching-induced geometric deviations in high-frequency AT-cut quartz resonators.
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| Title: | Electrode compensation strategy for etching-induced geometric deviations in high-frequency AT-cut quartz resonators. |
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| Authors: | Xu, Fangmeng1, Chen, Kaiwen1, Yin, Chunyan1, Dou, Guangbin1, gdou@seu.edu.cn, Sun, Litao1, slt@seu.edu.cn |
| Source: | Journal of Physics D: Applied Physics; 2026, Vol. 59 Issue 20, p1-18, 18p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00223727 |
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| DOI: | 10.1088/1361-6463/ae5f2c |
