Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles.
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| Title: | Hillock formation on high-temperature annealed AlN templates due to dislocation nucleation at AlON particles. |
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| Authors: | Lachowski, A.1, artur@unipress.waw.pl, Remmele, T.2, Kwasniewski, A.2, Hartmann, C.2, Żak, M.1, Smalc-Koziorowska, J.1, Petkovic, M.2, Albrecht, M.2, Schulz, T.2 |
| Source: | Applied Physics Letters; 5/18/2025, Vol. 128 Issue 20, p1-7, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0329728 |
