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The Effect of the Ar:N 2 :O 2 Flow Ratio on the Structure, Hardness, and Adhesion of Thin TiON Films.

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Bibliographic Details
Title:	The Effect of the Ar:N 2 :O 2 Flow Ratio on the Structure, Hardness, and Adhesion of Thin TiON Films.
Authors:	Kengesbekov, Aidar^1,2,3, Serikbaikyzy, Ainur^1,2, Askhatov, Arnur^1,3, ashatovarnur@gmail.com
Source:	Coatings (2079-6412); May2026, Vol. 16 Issue 5, p600, 15p
Database:	Applied Science & Technology Source
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Description
ISSN:	20796412
DOI:	10.3390/coatings16050600