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The Effect of the Ar:N 2 :O 2 Flow Ratio on the Structure, Hardness, and Adhesion of Thin TiON Films.

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Title: The Effect of the Ar:N 2 :O 2 Flow Ratio on the Structure, Hardness, and Adhesion of Thin TiON Films.
Authors: Kengesbekov, Aidar1,2,3, Serikbaikyzy, Ainur1,2, Askhatov, Arnur1,3, ashatovarnur@gmail.com
Source: Coatings (2079-6412); May2026, Vol. 16 Issue 5, p600, 15p
Database: Applied Science & Technology Source
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DbLabel: Applied Science & Technology Source
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PubType: Academic Journal
PubTypeId: academicJournal
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      – Type: doi
        Value: 10.3390/coatings16050600
    Languages:
      – Code: eng
        Text: English
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      Pagination:
        PageCount: 15
        StartPage: 600
    Titles:
      – TitleFull: The Effect of the Ar:N 2 :O 2 Flow Ratio on the Structure, Hardness, and Adhesion of Thin TiON Films.
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            NameFull: Kengesbekov, Aidar
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            NameFull: Serikbaikyzy, Ainur
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            NameFull: Askhatov, Arnur
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            – D: 01
              M: 05
              Text: May2026
              Type: published
              Y: 2026
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              Value: 16
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              Value: 5
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            – TitleFull: Coatings (2079-6412)
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