View in EDS HTML Full Text PDF Full Text

Ultrashallow EUV and Soft X‐Ray Gratings Fabricated by Broad‐Beam Nitrogen Ion Irradiation.

Saved in:
Bibliographic Details
Title: Ultrashallow EUV and Soft X‐Ray Gratings Fabricated by Broad‐Beam Nitrogen Ion Irradiation.
Authors: Kaufmann, Johannes1, johannes.michael.kaufmann@uni-jena.de, Siefke, Thomas1,2,3, Zeitner, Uwe1,2, S, Baskar, baskar133.se@velsuniv.ac.in
Source: Journal of Nanotechnology; 5/27/2026, Vol. 2026, p1-7, 7p
Database: Applied Science & Technology Source
Full text is not displayed to guests.
Description
ISSN:16879503
DOI:10.1155/jnt/3321990