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Ultrashallow EUV and Soft X‐Ray Gratings Fabricated by Broad‐Beam Nitrogen Ion Irradiation.

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Title: Ultrashallow EUV and Soft X‐Ray Gratings Fabricated by Broad‐Beam Nitrogen Ion Irradiation.
Authors: Kaufmann, Johannes1, johannes.michael.kaufmann@uni-jena.de, Siefke, Thomas1,2,3, Zeitner, Uwe1,2, S, Baskar, baskar133.se@velsuniv.ac.in
Source: Journal of Nanotechnology; 5/27/2026, Vol. 2026, p1-7, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
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An: 194135859
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PubType: Academic Journal
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      – Type: doi
        Value: 10.1155/jnt/3321990
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      – Code: eng
        Text: English
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        PageCount: 7
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      – TitleFull: Ultrashallow EUV and Soft X‐Ray Gratings Fabricated by Broad‐Beam Nitrogen Ion Irradiation.
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            NameFull: Siefke, Thomas
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            – D: 27
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              Text: 5/27/2026
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              Y: 2026
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              Value: 2026
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            – TitleFull: Journal of Nanotechnology
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