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200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.

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Bibliographic Details
Title: 200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.
Authors: Nayak, Sanjay1, sanjaynayak.physu@gmail.com, Picco, Andrea2, Piot, Adrien1, Ali, Washim Reza1, Nallagatla, Venkata Raveendra1, Bisht, Ravindra Singh1, Solonenko, Dmytro1, Henzen, Demian3, Lazzari, Carla Maria2, Serafini, Andrea2, Codegoni, Davide2, Balsamo, Amalia4, Scaldaferri, Rossana4, Allahyari, Elaheh4, Ghosh, Anirban1, Kratzer, Martin3, Costantini, Sonia2, Rusconi, Andrea5, De Pastina, Annalisa1, Moridi, Mohssen1
Source: Journal of Applied Physics; 6/21/2026, Vol. 139 Issue 23, p1-9, 9p
Database: Applied Science & Technology Source
Description
ISSN:00218979
DOI:10.1063/5.0331466