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200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.

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Title: 200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.
Authors: Nayak, Sanjay1, sanjaynayak.physu@gmail.com, Picco, Andrea2, Piot, Adrien1, Ali, Washim Reza1, Nallagatla, Venkata Raveendra1, Bisht, Ravindra Singh1, Solonenko, Dmytro1, Henzen, Demian3, Lazzari, Carla Maria2, Serafini, Andrea2, Codegoni, Davide2, Balsamo, Amalia4, Scaldaferri, Rossana4, Allahyari, Elaheh4, Ghosh, Anirban1, Kratzer, Martin3, Costantini, Sonia2, Rusconi, Andrea5, De Pastina, Annalisa1, Moridi, Mohssen1
Source: Journal of Applied Physics; 6/21/2026, Vol. 139 Issue 23, p1-9, 9p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 194702616
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: 200 mm wafer-scale integration of bilayer wurtzite ferroelectric AlScN exhibiting effective d33,f > 26.8 pm/V and e31,f > 4.6 C/m2.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; 6/21/2026, Vol. 139 Issue 23, p1-9, 9p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=194702616
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