Effect of Annealing in Air and Dry Nitrogen on MoOx Films Obtained by Magnetron Sputtering.
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| Title: | Effect of Annealing in Air and Dry Nitrogen on MoOx Films Obtained by Magnetron Sputtering. |
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| Authors: | Sendova-Vassileva, Marushka1,2, marushka@phys.bas.bg, Spasova, Stanka1,2, Benkovsky, Aleksander1,2, Dulev, Vladimir1,2, Topalski, Simeon1,2 |
| Source: | Coatings (2079-6412); Jun2026, Vol. 16 Issue 6, p720, 15p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 20796412 |
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| DOI: | 10.3390/coatings16060720 |
