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Constrained Dynamic Time Warping and Polyline Distance for Anomaly Detection in Semiconductor Manufacturing.

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Bibliographic Details
Title: Constrained Dynamic Time Warping and Polyline Distance for Anomaly Detection in Semiconductor Manufacturing.
Authors: Li, Gangjiang1, Hang, Yihong2, Yang, Zaizhou1,2, Yang, Zhice2, yangzhc@shanghaitech.edu.cn
Source: Applied Sciences (2076-3417); Jun2026, Vol. 16 Issue 12, p5779, 17p
Database: Applied Science & Technology Source
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