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Evaluation of the Effects of Geometric Degradation of the Showerhead Nozzle Exit on Process Characteristics in Etching Equipment: A Multiphysics Analysis Approach.

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Bibliographic Details
Title:	Evaluation of the Effects of Geometric Degradation of the Showerhead Nozzle Exit on Process Characteristics in Etching Equipment: A Multiphysics Analysis Approach.
Authors:	Yu, Jaewook¹, Yang, Sangmo², Choi, Jae-Boong¹, boong33@skku.edu
Source:	Applied Sciences (2076-3417); Jun2026, Vol. 16 Issue 12, p5830, 19p
Database:	Applied Science & Technology Source
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ISSN:	20763417
DOI:	10.3390/app16125830