Near-surface-weighted non-equilibrium viscoelastic transitions during mist-CVD growth of amorphous TiOx revealed by dual-frequency quartz crystal microbalance.
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| Title: | Near-surface-weighted non-equilibrium viscoelastic transitions during mist-CVD growth of amorphous TiOx revealed by dual-frequency quartz crystal microbalance. |
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| Authors: | Kobayashi, F.1, r202570146yf@jindai.jp, Yamamoto, Y.2, y.yamamoto@amaya-cvd.co.jp, He, H.2, he@amaya-cvd.co.jp, Ohno, T.2, oono@amaya-cvd.co.jp, Shirai, H.1,3, shirai@fms.saitama-u.ac.jp |
| Source: | Applied Physics Letters; 6/29/2026, Vol. 128 Issue 26, p1-6, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/5.0336178 |
