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High-temperature electrical performance and interface adhesion performance of SiC-based Pt thin-film RTDs.

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Bibliographic Details
Title:	High-temperature electrical performance and interface adhesion performance of SiC-based Pt thin-film RTDs.
Authors:	Fang, Ziyan^1,2, Fang, Xudong^1,2,3,4, dongfangshuo30@xjtu.edu.cn, Wu, Chen^1,2, Sun, Hao^1,2, Zhang, Yong³, Zhang, Zhongkai^1,2,4, Tian, Bian^1,2,4, Yuan, Hai⁵, Verma, Prateek⁶, Maeda, Ryutaro^1,7
Source:	Microsystems & Nanoengineering; 7/6/2026, Vol. 12 Issue 1, p1-15, 15p
Database:	Applied Science & Technology Source

Description
ISSN:	20961030
DOI:	10.1038/s41378-026-01350-w