Influence of Bottom Electrodes on the Ferroelectric Stability of AlScN Film at High Temperatures.
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| Title: | Influence of Bottom Electrodes on the Ferroelectric Stability of AlScN Film at High Temperatures. |
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| Authors: | Kim, Kyung Do1, Ryoo, Seung Kyu1, Yeom, Min Kyu1, Kim, Dong Jae1, Hwang, Cheol Seong1, cheolsh@snu.ac.kr |
| Source: | Advanced Electronic Materials; 7/6/2026, Vol. 12 Issue 13, p1-12, 12p |
| Database: | Applied Science & Technology Source |
| ISSN: | 2199160X |
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| DOI: | 10.1002/aelm.202500602 |
