S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing.
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| Title: | S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing. |
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| Authors: | Xie, Weiping1, weiping.xie@zju.edu.cn, Wu, Jiangchen1, Wang, Yuping1, Chen, Yining1, yining.chen@zju.edu.cn |
| Source: | Journal of Intelligent Manufacturing; Aug2026, Vol. 37 Issue 8, p3235-3252, 18p |
| Database: | Applied Science & Technology Source |
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| ISSN: | 09565515 |
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| DOI: | 10.1007/s10845-025-02683-5 |
