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S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing.

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Title: S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing.
Authors: Xie, Weiping1, weiping.xie@zju.edu.cn, Wu, Jiangchen1, Wang, Yuping1, Chen, Yining1, yining.chen@zju.edu.cn
Source: Journal of Intelligent Manufacturing; Aug2026, Vol. 37 Issue 8, p3235-3252, 18p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 195343137
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
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  Data: S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing.
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  Data: <searchLink fieldCode="AU" term="%22Xie%2C+Weiping%22">Xie, Weiping</searchLink><relatesTo>1</relatesTo>, <i>weiping.xie@zju.edu.cn</i><br /><searchLink fieldCode="AU" term="%22Wu%2C+Jiangchen%22">Wu, Jiangchen</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Wang%2C+Yuping%22">Wang, Yuping</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Chen%2C+Yining%22">Chen, Yining</searchLink><relatesTo>1</relatesTo>, <i>yining.chen@zju.edu.cn</i>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Intelligent+Manufacturing%22">Journal of Intelligent Manufacturing</searchLink>; Aug2026, Vol. 37 Issue 8, p3235-3252, 18p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=195343137
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1007/s10845-025-02683-5
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      – Code: eng
        Text: English
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        PageCount: 18
        StartPage: 3235
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      – TitleFull: S2GA-VM: self-supervised and global-aware virtual metrology for accurate film thickness prediction in semiconductor manufacturing.
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            NameFull: Xie, Weiping
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            NameFull: Wu, Jiangchen
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            NameFull: Wang, Yuping
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            – D: 01
              M: 08
              Text: Aug2026
              Type: published
              Y: 2026
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              Value: 37
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              Value: 8
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            – TitleFull: Journal of Intelligent Manufacturing
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