Enhancement of shallow trench isolation top corner rounding for high-volume manufacturing.
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| Title: | Enhancement of shallow trench isolation top corner rounding for high-volume manufacturing. |
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| Authors: | Wang, Ran1,2, Lin, You-Cheng2, Lin, Zi-Ren2, Lin, Dong-Yi2, Yang, Zhi-Qiang2, nexchip_etching@163.com, Yu, Xin-Yao1, yuxinyao@ahu.edu.cn |
| Source: | Journal of Materials Science: Materials in Electronics; Jul2026, Vol. 37 Issue 19, p1-15, 15p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-026-17801-z |
