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Enhancement of shallow trench isolation top corner rounding for high-volume manufacturing.

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Bibliographic Details
Title: Enhancement of shallow trench isolation top corner rounding for high-volume manufacturing.
Authors: Wang, Ran1,2, Lin, You-Cheng2, Lin, Zi-Ren2, Lin, Dong-Yi2, Yang, Zhi-Qiang2, nexchip_etching@163.com, Yu, Xin-Yao1, yuxinyao@ahu.edu.cn
Source: Journal of Materials Science: Materials in Electronics; Jul2026, Vol. 37 Issue 19, p1-15, 15p
Database: Applied Science & Technology Source
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