Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique.
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| Title: | Thermal stability of nonhydrogenated multilayer amorphous carbon prepared by the filtered cathodic vacuum arc technique. |
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| Authors: | Teo, Edwin H. T.1, Lee, M. L.1, Lee, C. K.1, Ee, C. L.1, Tay, B. K.1, ebktay@ntu.edu.sg, Chua, Daniel H. C.2 |
| Source: | Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2007, Vol. 25 Issue 3, p421-424, 4p, 1 Chart, 6 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 07342101 |
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| DOI: | 10.1116/1.2712193 |
