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Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering

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Bibliographic Details
Title: Characterization of Mo/Si soft X-ray multilayer mirrors by grazing-incidence small-angle X-ray scattering
Authors: Siffalovic, P.1, peter.siffalovic@savba.sk, Majkova, E.1, Chitu, L.1, Jergel, M.1, Luby, S.1, Keckes, J.2, Maier, G.3, Timmann, A.4, Roth, S.V.4, Tsuru, T.5, Harada, T.5, Yamamoto, M.5, Heinzmann, U.6
Source: Vacuum; Aug2009, Vol. 84 Issue 1, p19-25, 7p
Database: Applied Science & Technology Source
Description
ISSN:0042207X
DOI:10.1016/j.vacuum.2009.04.026