Atomistic modeling of defect diffusion and interdiffusion in SiGe heterostructures
Saved in:
| Title: | Atomistic modeling of defect diffusion and interdiffusion in SiGe heterostructures |
|---|---|
| Authors: | Castrillo, P., pedcas@tel.uva.es, Jaraiz, M.1, Pinacho, R.1, Rubio, J.E.1 |
| Source: | Thin Solid Films; Feb2010, Vol. 518 Issue 9, p2448-2453, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00406090 |
|---|---|
| DOI: | 10.1016/j.tsf.2009.10.113 |
