The effect of Fe, Cr and Mo on the resistivity of the top silicon layer of buried oxide silicon-on-insulator structures.
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| Title: | The effect of Fe, Cr and Mo on the resistivity of the top silicon layer of buried oxide silicon-on-insulator structures. |
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| Authors: | Puga, M. M. S., Hummel, R. E., Burk, D. E. |
| Source: | Semiconductor Science & Technology; August 1992, Vol. 7, p1067-1071, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 02681242 |
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| DOI: | 10.1088/0268-1242/7/8/007 |
