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Numerical inverse method of determining film parameters of uniaxial anisotropic film with an ellipsometer.

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Bibliographic Details
Title:	Numerical inverse method of determining film parameters of uniaxial anisotropic film with an ellipsometer.
Authors:	Zhu, Rong, Lin, Ci, Wei, Yu
Source:	Applied Optics; August 1 1992, Vol. 31, p4497-4500, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	00036935
DOI:	10.1364/AO.31.004497