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Kinetics of platinum silicide formation during rapid thermal processing.

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Bibliographic Details
Title: Kinetics of platinum silicide formation during rapid thermal processing.
Authors: Pant, A. K., Murarka, S. P., Shepard, C.
Source: Journal of Applied Physics; September 1 1992, Vol. 72, p1833-1836, 4p
Database: Applied Science & Technology Source
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