Dry etching of Ti in chlorine containing feeds.
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| Title: | Dry etching of Ti in chlorine containing feeds. |
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| Authors: | d'Agostino, R., Fracassi, F., Pacifico, C. |
| Source: | Journal of Applied Physics; November 1 1992, Vol. 72, p4351-4357, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.352199 |
