Dry etching of Ti in chlorine containing feeds.
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| Title: | Dry etching of Ti in chlorine containing feeds. |
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| Authors: | d'Agostino, R., Fracassi, F., Pacifico, C. |
| Source: | Journal of Applied Physics; November 1 1992, Vol. 72, p4351-4357, 7p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 500053644 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: Dry etching of Ti in chlorine containing feeds. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22d'Agostino%2C+R%2E%22">d'Agostino, R.</searchLink><br /><searchLink fieldCode="AU" term="%22Fracassi%2C+F%2E%22">Fracassi, F.</searchLink><br /><searchLink fieldCode="AU" term="%22Pacifico%2C+C%2E%22">Pacifico, C.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; November 1 1992, Vol. 72, p4351-4357, 7p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=500053644 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.352199 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 7 StartPage: 4351 Titles: – TitleFull: Dry etching of Ti in chlorine containing feeds. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: d'Agostino, R. – PersonEntity: Name: NameFull: Fracassi, F. – PersonEntity: Name: NameFull: Pacifico, C. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 11 Text: November 1 1992 Type: published Y: 1992 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 72 Titles: – TitleFull: Journal of Applied Physics Type: main |
| ResultId | 1 |
