Optical and electrical properties of heavily phosphorus-doped epitaxial silicon layers.
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| Title: | Optical and electrical properties of heavily phosphorus-doped epitaxial silicon layers. |
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| Authors: | Lubberts, G., Burkey, B. C. |
| Source: | Journal of Applied Physics; February 1 1984, Vol. 55, p760-763, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.333109 |
