APA (7th ed.) Citation

Lubberts, G., & Burkey, B. C. (1984). Optical and electrical properties of heavily phosphorus-doped epitaxial silicon layers. Journal of Applied Physics, 55, 760. https://doi.org/10.1063/1.333109

Chicago Style (17th ed.) Citation

Lubberts, G., and B. C. Burkey. "Optical and Electrical Properties of Heavily Phosphorus-doped Epitaxial Silicon Layers." Journal of Applied Physics 55 (1984): 760. https://doi.org/10.1063/1.333109.

MLA (9th ed.) Citation

Lubberts, G., and B. C. Burkey. "Optical and Electrical Properties of Heavily Phosphorus-doped Epitaxial Silicon Layers." Journal of Applied Physics, vol. 55, 1984, p. 760, https://doi.org/10.1063/1.333109.

Warning: These citations may not always be 100% accurate.