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Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.

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Bibliographic Details
Title:	Reactive unbalanced magnetron sputtering of hydrogenated amorphous silicon and silicon oxide.
Authors:	Hall, G. W., Howson, R. P., Chew, A.
Source:	Vacuum; March-April 1993, Vol. 44, p227-230, 4p
Database:	Applied Science & Technology Source

Description
ISSN:	0042207X
DOI:	10.1016/0042-207X(93)90159-8