The reactive sputtering of thin films of TiN at low target voltages.
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| Title: | The reactive sputtering of thin films of TiN at low target voltages. |
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| Authors: | Swady, R. A., Ja'fer, H. A., Howson, R. P. |
| Source: | Vacuum; March-April 1993, Vol. 44, p297-301, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/0042-207X(93)90173-8 |
