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Simulation of ion beam assisted deposition—a comparison with experimental results.

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Bibliographic Details
Title: Simulation of ion beam assisted deposition—a comparison with experimental results.
Authors: Ektessabi, A. M., Sato, S., Kitamura, H.
Source: Vacuum; March-April 1993, Vol. 44, p213-217, 5p
Database: Applied Science & Technology Source
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