Reactive ion-plating at low ion energies with an unbalanced magnetron.
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| Title: | Reactive ion-plating at low ion energies with an unbalanced magnetron. |
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| Authors: | Howson, R. P., Ja'fer, H. A., Spencer, A. G. |
| Source: | Vacuum; March-April 1993, Vol. 44, p191-195, 5p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/0042-207X(93)90152-Z |
