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Reactive ion-plating at low ion energies with an unbalanced magnetron.

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Bibliographic Details
Title: Reactive ion-plating at low ion energies with an unbalanced magnetron.
Authors: Howson, R. P., Ja'fer, H. A., Spencer, A. G.
Source: Vacuum; March-April 1993, Vol. 44, p191-195, 5p
Database: Applied Science & Technology Source
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